Bi-directional flow sensors.

The MFC2030 Bi-Directional Flow Sensor has been launched by Memsic. It is intended for a wide range of applications such as analytical instruments, anesthesia and other medical flow devices, process control, and natural gas measurement.

The company utilises its highly advanced and successful MEMS thermal accelerometer platform, of which it has shipped hundreds of millions of units into a variety of automotive and consumer applications, as the flow sensing element in this high performance flow sensor. The MFC2030 leverages this experience, technology and economy of scale to offer a high performance, reliable and cost effective flow sensor.

Memsic was the first and only company to integrate a MEMS inertial sensor and signal processing circuitry together on a standard monolithic CMOS wafer. This same advanced MEMS technology and manufacturing process are leveraged into this advanced flow sensor solution.
In addition to exceptionally low power consumption, a MEMS suspended-bridge microstructure enables a highly sensitive flow measurement. This is due to the low thermal mass and conductivity of the bridge structure, which results in gas flow becoming the primary means to transfer heat via convection from the heater to the thermopiles. This effective and rugged structure, when coupled with advanced CMOS circuitry and a 16-bit on-chip A/D, provides an exceptionally wide flow dynamic range, which is critical for a wide range of precision industrial, consumer and medical applications.

The sensor is highly configurable, with multiple mounting options including manifold mount, BSP and NPT fittings. Evaluation kits with USB interface and a user friendly GUI for easy set-up and data collection are now available.