Thursday 3 January 2013

MEMS pressure sensors

This is a quick heads-up on International Frequency Sensor Association's (IFSA) newly published book titled, "MEMS Pressure Sensors: Fabrication and Process Optimization," from the pen of Parvej Ahmad Alvi Assistant Professor in the Department of Physics, School of Physical Sciences, Banasthali University, India.

So far, no book has described the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors, and therefore, the book has been written taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. Thus this may be said to be an unique book.

It will greatly benefit undergraduate and postgraduate students of MEMS and NEMS course, process engineers and technologists in the microelectronics industry as well as MEMS-based sensors manufacturers.

MEMS Pressure Sensors: Fabrication and Process Optimization, ISBN: 978-84-616-2207-8, 176 p., hardcover.

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