Measuring low level acceleration

ServoK-Beam High Sensitivity Capacitive Accelerometer

A single axis, high sensitivity, capacitive accelerometer for measuring static acceleration or low-level, low-frequency vibration is now available from Kistler Instruments. The new ServoK-Beam accelerometer has high resolution, excellent frequency response and insensitivity to thermal transients and transverse acceleration making it ideal for a wide range of applications from modal analysis of large structures and vehicle dynamics to measuring seismic effects on structures during earthquakes and aerospace ground testing.

The measurement range of ±3 g, wide static and dynamic frequency response from zero to 500 Hz and ultra-low noise of 4 μgrms below 100 Hz are combined with sensitivity of 1,200 mV/g, high immunity to thermal transients 1,500 gpk shock rating and low transverse acceleration. The ServoK-Beam is a three terminal, variable capacitance sensor, made by a bulk Micro Electro-Mechanical System (MEMS) process. The sensing element and conditioning electronics are integrated into an hermetically sealed titanium housing with a mass of 95 grams. A hard anodized housing provides ground isolation and the unit is powered by a bipolar supply between ±6 and ±12 V DC.