High-performance drive controllers.

Aerotech has introduced two high-performance single-axis controllers: the digital XC4 and XC4e PWMs. They are suitable for driving brushed or brushless DC motors as well as moving coil actuators and stepper motors. A special feature besides the position-synchronized outputs (PSO) is the HyperWire® fibre optic interface.

Aerotech’s digital XC4 and XC4e PWM (Pulse Width Modulation) controllers are powerful, single-axis motor drive controllers with an operating voltage up to 340VDC and a peak current of 30A. All drive variants are compatible with the A3200 automation platform which uses the HyperWire® drive bus. The digital current and position control loop ensures best positioning and synchronisation accuracy, a control bandwidth of up to 20kHz, processing of digital and analogue inputs and outputs, data acquisition, process control and real-time encoder interpolation.

Standard features include Safe Torque Off (STO), a data array with over 4 (XC4) or 16 million (XC4e) 32-bit elements, digital and analogue I/Os, single-axis (XC4) and multi-axis (XC4e) position-synchronised outputs (PSO), special inputs for referencing and travel limitation and improved current monitoring. Square wave, sine wave and absolute encoder signals can be processed. The maximum input frequency for square-wave encoder signals is 40 million pulses per second for both variants. With the additional MX1 function, the XC4 drive controller can interpolate sinusoidal encoder signals with up to 14 bits (16,384-fold). For the XC4e, the additional MX2 and MX3 functions are available as an option, which enable interpolation of 16 bits (65,536x), and with the MX3 option, the processing of two encoder signals, achieving improved position and speed control. In addition, options are available for the XC4e that extend the standard PSO functionality. For example, three encoders can be tracked in real time via the 3-channel PSO, or a complete axis system can provide a PSO signal depending on the actual point in the room.

Both XC4 variants can be equipped with an optional I/O expansion card, which significantly increases the number of inputs and outputs. The I/O card also offers a dedicated PSO output and PSO synchronisation input, which is often used to synchronise with a mode-locked external frequency.

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Scanner for laser micromachining.

Aerotech is introducing a new high-performance Galvo Scanner. The AGV-SPO offers a larger field of view than conventional 2D scanners, reduces laser spot distortion, and is flexible enough to accommodate a wide range of laser wavelengths thanks to a large variety of mirror surfaces. As a result, the laser scanner is suitable for a wide range of applications, from additive manufacturing to medical devices.

With just one pivot point for X and Y deflection, Aerotech's AGV-SPO Galvo Scanner significantly increases the field of view, reducing laser spot distortion in critical laser micromachining applications. Due to the special optical design, the entrance pupil of the laser beam coincides with the X and Y deflecting mirrors, increasing the effective numerical aperture of the scanner system. The design immediately increases the field of view for a given focal length and reduces laser spot distortion throughout the working area. With the new Galvo Scanner, even larger parts can now be processed faster and with improved uniformity.

The AGV SPO scanner provides a range of mirror coatings and focusing optics to support a variety of commonly used laser wavelengths and focal lengths. Also, customer-specific optics and optical mounting options can be adapted as a special solution. Optional air-cooled mirrors and/or water-cooled motors ensure constant temperature conditions and continuously good work results even with high laser power or highly dynamic motion profiles.

The laser scanner benefits from the high performance of the Aerotech’s controllers with their advanced motion control and position synchronised output (PSO). In addition, path control functions such as acceleration limitation offer the ability to automatically reduce scanning speed in tight bends or small radii to minimise overshoot. In addition, the laser can also be triggered based on the position feedback of the mirrors via the PSO. This ensures a consistent laser spot overlap when the scanner changes speed. Aerotech's Infinite Field of View (IFOV) feature seamlessly combines servo drive and scanner motion to extend laser marking across the entire servo axis travel range. This avoids stitching errors that can occur during the move expose repeat process.

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Linear motors.

Aerotech’s ECO-LM and ECO-SL series linear stages combine high performance and rugged mechanical design in a cost-effective, economic package. A comprehensive choice of direct-drive linear motor, rotary servomotor, or stepping motor versions is available across 44 models with travels from 50 mm to 800 mm, plus vacuum and cleanroom versions.

The ECO linear stage series builds upon Aerotech’s long tradition of producing low total cost of ownership motion designs. Excellent positioning specifications, high stiffness, and a variety of options and features combined with economic pricing make ECO stages an ideal choice for applications where robust motion performance is needed.

Long-life precision recirculating linear bearings, along with Aerotech’s machining and assembly craftsmanship, enable the best geometric performance per unit price on the market today. Unlike other low-cost competitive motion stages, ECO stages can be integrated into complex machines with the assurance they will perform at a high level and outlast other machine components.

The ECO-LM series direct-drive linear motor stages are optimized with high precision, noncontact linear encoders. The precision noncontact encoders enable minimum incremental motion to 10 nm with micrometer-level repeatability. The optional HALAR factory calibration improves positioning accuracy to ±1.5 µm. The ironless forcer coil provides high force with zero cogging for smooth velocity and position control, ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. The linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness. ECO-LM stages are available in 17 different models with travels ranging from 100 mm to 800 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

For even more cost-sensitive applications, the ECO-SL series includes several NEMA 23 stepper motor and brushless servomotor options. The ECO-SL series is designed with many standard features and options that make the design adaptable to specific applications. Several encoder options provide electrical resolutions ranging from 0.5 µm down to sub-nm. A holding brake can be added for vertical applications. A motor fold-back kit is available for space-constrained applications to reduce the overall stage length. ECO-SL stages are available in 27 different models with travels ranging from 50 mm to 800 mm and speeds up to 300 mm/s.

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Motion controller ideal for robots.

Aerotech’s HEX RC is a 6-axis motion controller ideal for controlling robotic systems like hexapods. The HEX RC is 4U rack-mountable and compatible with the Automation 3200 (A3200) motion platform.

• - 4U high, rack-mount, six-axis controller for brush, brushless, and stepper motors
• - Ideal for controlling six-axis robotic systems like hexapods
• - Real-time A3200 distributed control architecture allows synchronized motion on up to 32 axes
• - FireWire® or ASCII command interface via TCP/IP
• - Program in native RS-274 G-code, AeroBasic command set, C, C++/CLI, .NET, MATLAB®, or LabVIEW® for the ultimate in programming flexibility

A high-performance processor provides the intense computing power needed to run up to 32 axes, perform complex, synchronized motion trajectories, manipulate I/O, and collect data at high speeds.

Powerful Control Architecture

The HEX RC features 6-axes of drives capable of controlling any combination of brush, brushless, or stepper motors. It digitally performs both current loop and servo loop closures to ensure the highest level of positioning accuracy and performance. The HEX RC connects and controls up to 26 additional axes of servo, stepper, or piezo-driven stages using the A3200 distributed control architecture.

Interface and Design Options
The HEX RC is designed with an ASCII command interface over TCP/IP for control in applications such as beamlines. Alternatively, it can act as a master controller to control other A3200 external drives via the FireWire® interface.

The HEX RC accepts amplified-sine or digital encoders. Optional integrated encoder multipliers, up to X4096, ensure high-resolution positioning.

An optional 6-axis jog pendant permits easy, manual control of the positioning system. In safety critical applications, an emergency stop option with redundant safety relays can be added.

Flexible Programming Environment
Aerotech’s A3200 focuses on ease of use for the programmer, shortens development time compared with other tools, and provides the flexibility to use the tools or controller most familiar to programmers. A complete Integrated Development Environment and a comprehensive .NET motion library provide classes for motion, I/O, status, and diagnostic information. You can program in Visual Studio and use the .NET library, or use the Motion Composer (IDE) to develop code with AeroBasic™ commands or G code. A LabVIEW® VI library is available for NI users, while a complete C library is available for those using Visual Basic, C++, or C.

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Dedicated to motion control and positioning in Germany!

On March 2, 2016 Aerotech celebrated the groundbreaking for our new Aerotech Germany office in Fürth, (D). Construction and relocation to the new building has been completed and the opening ceremony was held on May 18th, 2017.

Aerotech have expanded with a dedicated building in Germany.

According to Norbert Ludwig, the Managing Director of Aerotech Germany, "We had approximately 40 participants from outside [Aerotech] plus 20 Aerotech Representatives at the opening ceremony. Participants at the opening ceremony included customers and suppliers, architects, and craftspeople. Our special guest was the Major of the city of Fürth.”

After a general welcome, Norbert Ludwig gave a presentation on Aerotech GmbH describing the new, greatly expanded support capabilities in Germany, followed by some greetings and welcome words from the President of Aerotech, Mark Botos. After lunch the Major of Fürth spoke and there was also a presentation of an invited speaker, a Physics professor from a German university, talking about laser structuring of materials using Aerotech components.

The opening ceremony was very well received and the company looks forward to the additional sales, service, and support that our new office will allow them to expand the numbers of their customers in Germany, as well as throughout Europe. The German building now joins a dedicated Britsh building, as well as a network of offices and representatives, in support of other European customers.

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Mechatronic solution to thermal errors.

The most frequent approach to reducing thermal errors is to regulate the environment in which the machine operates. This mitigates the need to design a thermally insensitive machine, which is a difficult and costly endeavor.

Although successful at minimizing thermal effects, environmental regulation can also be expensive when maintaining precise building temperature control, and always adds to production quality risks due to the inherently unreliable stability of most air-conditioning systems. The level of environmental stability achieved in most industrial facilities (normally on the order of 1°C) can be wholly inadequate for many high-precision manufacturing processes.

Aerotech’s new product feature, ThermoComp™, is a complete mechatronic solution to thermal errors. Through the employment of integrated hardware and sensors, and a proprietary compensation algorithm implemented via Aerotech’s A3200 controller software, ThermoComp minimizes stage inaccuracy due to thermal effects even over extreme temperature ranges. Up to 90% of the thermal-related errors can be eliminated, regardless of stage travel and range of temperature change.

Additionally, internal self-heating is another major source of thermal-related positioning errors, particularly in stages without direct feedback devices such as ball-screw-driven stages. ThermoComp not only prevents environmental changes from affecting positioning performance, but also diminishes the errors caused through internal heating, eliminating up to 90% of the thermal-related errors caused by the self-heating of a ball-screw-driven stage.

ThermoComp is currently available on all Aerotech PRO Series stages and operates through an intuitive and easy-to-use integrated command set within the Aerotech A3200 controller software.

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Microscope objective and optics positioning.

Aerotech’s QFOCUS® QF-50 piezo nanopositioning stage is designed for high-performance microscope objective and optics positioning. It offers 400 μm closed loop and 450 μm open loop travel, high speed, 0.01% linearity, sub-nanometer resolution, and 4 nm bidirectional repeatability. The QF-50 accommodates optical instruments and next-generation laser micromachining applications. Due to a high-stiffness mechanical design, the QF-50 can outperform competitive piezo scanner offerings with larger, higher numerical aperture (NA) objectives. The QF-50 is ideal for optical positioning applications requiring high precision and throughput coupled with long travels.

The QFOCUS QF-50 is guided by precision flexures optimized using finite element analysis for outstanding stiffness and resonant frequency to enable high process throughput and fast closed-loop response. Meticulous care was taken in the QF-50 flexure bearing design to ensure unrivaled geometric performance with straightness errors to 40 nm throughout the entire travel range.

Optional closed-loop feedback using a unique capacitive sensor design allows for sub-nanometer resolution and high linearity. Unlike foil strain gages or piezoresistive sensors, capacitive sensors provide a direct measurement of the positioning carriage for superior accuracy and repeatability

When coupled with Aerotech’s Q-series controllers and drives, the QF-50 demonstrates sub-nanometer positioning resolution and in-position stability (jitter) while maintaining high positioning bandwidth. Advanced software options, such as Dynamic Controls Toolbox and Motion Designer, provide a variety of highly-effective, easy-to-use tools including Iterative Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times. OEM drive options are also available.

The QF-50 is available with threaded adapters to fit most microscopes and objectives. The microscope turret mounting allows fast and simple positioning at any desired orientation. In addition, tapped holes on the stage body provide alternative mounting for custom interfaces in machines or other optical instruments. The QF-50 is available with a clear aperture of 29 mm as standard. Custom stage designs, travels, and threaded adapters are available.

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Motion & Machne control.

Aerotech's new Integrated Motion and Machine Control Solutions brochure presents their latest machine automation products.

Contents of the brochure include descriptions and specifications of all Aerotech controls and software, setup and configuration, advanced diagnostic and tuning capabilities, the integrated development environment, operator interface, software architecture, a review of all controller and drive technology, standard and advanced control capabilities, hexapod and piezo controls, controller and hardware comparison charts, as well as a quick reference for servomotors.

The brochure, downloadable free here (pdf). concludes with a corporate overview of Aerotech, the markets and industries we serve, training and support, and our certifications.

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Scanning the skys!

Motion sub-system is selected for ultra-precision plate scanner at the Royal Observatory of Belgium

The DAMIAN ultra-precision scanning system at the Royal Observatory of Belgium (ROB) fulfils a significant part of a global programme for the digitisation of astrometric plates and aerial photographic images that span over a century and has shaped our understanding of the world, the solar system and the universe. With more than three million plate images estimated in the astronomical community alone, the programme was borne out of a need to provide a much needed centralised archive for the digital age, to enhance the accuracy of predictive ephemerides and not least to preserve the heritage of this important work where media deterioration is an increasing problem, particularly for older photographic processes. As part of an international network of institutions involved in similar work, the ROB has become a global centre of excellence particularly where extreme levels of accuracy are required such as astrometry plates.

One particular exacting project example at the ROB involves digitising thousands of photographic plates for the US Naval Observatory. Taken over a period of 30 years several decades ago, using a 26-inch refractor telescope, the photographs record the moons of Mars, Jupiter and Saturn. By combining the process with highly sophisticated measurement and prediction software, DAMIAN can actually fill in many gaps that have hitherto been difficult to calculate. By improving this understanding of the interactive motions and internal structure models of these solar system bodies, the accuracy of calculation for their future positions over time is significantly improved. Other work carried out has similar significant implications for galactic kinematics, space surveillance and other areas of research in high precision aerial mapping.

The ROB began development of the DAMIAN (Digital Access to Metric Images Archives Network) digitiser with a study that produced design specifications for a 350 mm x 350 mm X-Y scanning motion system. To ensure the perfect reproducibility of the original analogue photographic images, the positional accuracy and repeatability targets needed to be an order above the inherent accuracy for the plates. This value was interpreted in the region of 0.5 microns over the whole scanning area with respect to a fixed telecentric objective of a sophisticated digital camera system. To ensure the fastest possible throughput, the motion system required a full move displacement of 10 mm in less than half a second including acceleration, deceleration and settling time and once in position, the stability (jitter) requirement was just 20 nanometres. These factors would ensure that the plates could be fully scanned and archived in a matter of minutes rather than older methods which were less accurate and required hours of processing. The machine specification also called for automatic loading of the glass photographic plates and film rolls, with a working duty cycle close to 24/7 continuous and unattended operation - so high reliability, low maintenance and long working life were also critical factors.

To realise such extreme precision and dynamic performance, the ROB chose Aerotech for a complete motion sub-system based upon its ABL3600 series open-frame air bearing table in a custom engineered system solution that included a lapped granite base plate, a granite bridge with a vertical focussing axis for the camera and optical assembly, plus a photographic plate holder, plate storage tower and fully automatic transport system.

Now delivered and fully commissioned, the DAMIAN digitiser is housed in a temperature and humidity controlled clean room, maintained to within 0.1ºC and 1%RH. Aerotech’s ABL3600 series X-Y stage includes a preloaded, high-stiffness air bearing system that has been perfected over many product generations featuring powerful dual brushless and slotless linear motors on each axis with glass scale linear encoder servo feedback. Two granite rails form a reference for the lower axis and both axes are referenced to a lapped granite surface plate with passive air isolation to maximise vibration stability.  In combination with this positioning system and fundamental to the machine's overall dynamic performance, Aerotech's linear technology servo amplifiers guarantee exceptionally smooth motion, high bandwidth and outstanding in-position stability with zero backlash or hysterisis. The friction free mechanics also provide the added benefit of very low maintenance and an essentially limitless working life. The large through aperture of the open frame design allows back illumination for the plates and images. The design of the ABL3600 has a pedigree of successful applications in semiconductor fabrication and test, and is a well matched solution for demanding scanning microscopy, imaging and step & repeat positioning applications.

For the ROB, Aerotech extended the ABL3600's normal working travel range from 250 mm to 350 mm in both axes. For such high precision applications, Aerotech's HALAR calibration firstly ensures optimal levels of accuracy, bi-directional repeatability, straightness and flatness for each axis then performs error mapping with laser based measurement systems at Aerotech's state-of-the-art metrology lab - with the calibration file pre-configured on the motion controller.  During tests at Aerotech and on-site at the ROB, object locations on a calibrated test plate were repeated to within 70 nanometres over a usable X-Y travel range of 335 mm – this far exceeded the original working specification.  Other impressive results included geometric test for accuracy and repeatability to better than +/- 0.1 micron and the displacement speed and  in-position stability performance were fully met.

The DAMIAN ultra-precision scanning system includes a full cable management system and was delivered complete with Aerotech's A3200 Automation Platform motion control system which controls the main X-Y axes as well as several other motion axes for film wind, plate stacking and tray height adjustment. The ROB took care of interfacing the A3200 to its own imaging software using a step and repeat procedure with alignment accuracy ensured using selected objects on the photographic media. Images are recorded at stand-still, thus the need for such high in-position stability.
The  PC based software-only motion and machine controller provides position, velocity and time information to  Firewire® interfaced linear technology servo drives.  A range of optional modules include HMI, soft PLC and vision control. The fully deterministic controller can be programmed using Aerotech’s own AEROBasic™, RS274 G-code and LabviewTM. Alternatively programmers can call upon the powerful Microsoft® .NET development environment to help reduce project development timescales with C, C++, VisualBasic® or Delphi based programming.

This application is fairly typical for Aerotech's engineered systems approach where customers provide their own very specialised expertise in combination with a fully tested and certified motion sub-system which fulfils a very intrinsic 'enabling technology' element for the entire system.

Programmable automation controller to launch at #SPSIPCDRIVES

Aerotech launches new MotionPAC Programmable Automation Controller at SPS/IPC/DRIVES Exhibition

Aerotech will launch its new MotionPAC Integrated Motion and Machine Controller at this year's SPS/IPC/DRIVES Exhibition in Nuremberg on 23rd – 25th November.

The PC-based MotionPAC is a single development environment machine controller that combines an industry standard  PLC engine with IEC61131-3 programming capabilities such as sequential function block and structured text programming for I/O event handling and Aerotech’s sophisticated multi-axis motion engine to provide best possible control of moving axes. The system is very flexible and highly customisable and includes programming options such as adding custom function blocks using Microsoft’s .NET Framework, or running AeroBASIC programs directly on the controller and interfacing with other interface software such as LabVIEW. Other useful features include the ability to position axes whilst acquiring high speed digital and analogue data from the controllers inputs, recorded against encoder feedback and ultra-precise output triggering based on encoder position.
For example, MotionPAC will allow users to tightly control multi-axis motion trajectories to within microns using their direct-drive positioning mechanics, and with real-time/real position data acquisition from its nanometre level encoder technologies, output position synchronised pulses to control external events such as the firing pattern of a laser or precisely timed 'electronic gearbox' functions. All of this is possible using a combination of IEC61131-3 and  .NET Framework based programming.

The new controller is equipped with a number of sophisticated control algorithms and hardware options that the compoany developed across its range of advanced motion controls that substantially boost machine speeds and accelerations, deliver much improved  performance and increase production throughput. These include simple-to-use tools that reduce unwanted harmonic and periodic disturbances, minimise dynamic following errors, increase dynamic accuracy and significantly improve in-position stability. For the first time, these advanced functions have been combined with IEC61131-3 programming to deliver the reliability of a PLC and the flexibility of the PC in one single control solution.

The single development environment also allows machine builders and OEMs the benefit of considerably reduced machine integration and build timescales with the machine tags defined only once and available across all applications regardless of the programming language selected. And, with its PC-based architecture, the MotionPAC power will increase in-line with processor development to enable advanced motion and machine control solutions for tomorrows applications.

Ultra-smooth precision motion in a production grade design

Anti-creep precision cross roller bearings and direct drive servo with Aerotech's well proven hard top/side sealed protection system provide exceptionally smooth high precision motion in harsh manufacturing environments

Aerotech has launched a new range of industrial grade positioning stages that feature direct-drive linear servo motors and ultra-smooth cross roller bearings in a hard top/side sealed protection design that offers outstanding levels of positional and geometric precision for harsh production environments.

The new ALS2200 range is aimed at high precision/high throughput manufacturing applications such as multi-axis laser micromachining which typically demands very tight velocity and in-position control combined with exceptionally smooth motion and micron level straightness and flatness. Free from recirculating bearing elements and with a high power cog-free linear servo motor, drive induced stage vibration is reduced to almost imperceptible levels resulting in outstanding velocity stability.
With a nominal stage width of under 204 mm, the range covers a choice of 100 mm or 150 mm travel with direct load up to 30 kg, HALAR calibrated accuracy to +/- 0.75 microns, a bi-directional repeatability of +/- 0.2 microns, and speeds to 500 mm/sec. Positioning resolution is up to 3 nanometres with zero backlash.

The small footprint ALS2200 contains the linear servo motor, anti-creep precision bearings and encoder feedback completely within the stage's side sealed protection system. The full-length metal waycover and tensioned side strap design has been successfully applied over many generations of Aerotech stages and is much preferred to bellows protection which are troublesome to maintain and tend to increase the overall stage profile. The vertical side straps prevent debris from accumulating and are under constant tension to maintain a tight seal. End mounted motor and feedback connectors facilitate easy installation and dual X-Y stages can include track type cable trays on the upper axis for a neat cable management system. The durable aluminium construction includes a scratch resistant Teflon® impregnated hard coat finish with the tabletop mounting holes finished with steel inserts to ensure long thread life.

Aerotech's direct-drive linear servo motors and non contacting linear encoders are wear free, providing extremely high reliability, and with very low maintenance required the MTBF stage life is specified at more than 20,000 hours.

Aerotech can provide a choice of PWM digital amplifiers for best acceleration and speed performance, or low-noise linear stage amplifiers where customers require no-compromise smoothness and in-position stability. Both amplifier types combine with a flexible choice of Aerotech motion controls which suit stand alone or multi-axis use with advanced controls such as Position Synchronised Output (PSO) command that completely synchronises real time multi-axis position with laser firing, camera capture, data acquisition or NDT test triggering to produce the highest quality parts or critical accuracy test procedures.

Digital servo amplifier

Aerotech has launched a new digital servo amplifier with a linear power stage for ultra-high resolution brushed or brushless linear and rotary motion control systems. The new compact ML series amplifier is intended for lower power use but maintains the very high performance characteristics required for nanometre and microradian level precision positioning applications that are acutely susceptible to electrical noise, and where PWM servo amplifiers become unusable. The DSP based ML range is designed for minimal radiated noise to allow the servo system to provide exceptional levels of speed control and in-position stability for ultra-smooth motion profiles, and to ensure negligible interference levels for sensitive processing and measuring equipment.

Aimed at very high resolution motion systems applications as found in NDT, MEMS, vision systems and microscopy but with less dynamic performance requirements, the new amplifier is available in three versions: as the Ndrive ML option for Aerotech's A3200 software only motion controller; as an entry level version of the Soloist™ ML integrated single-axis position controller range; and as a low-cost linear drive stage solution for the multi axis Ensemble™ ML, a networkable and panel mount motion control system.

The basic specifications for the ML series linear amplifiers in all configurations includes 5A continuous/10A peak current rating with a customer supplied DC bus voltage of +/- 40 V and a control supply requirement of 18-36 VDC. A single 16-bit ±10 V analogue input is used for direct interfacing to the motion controller with an ESTOP sense input included.

The ML features primary and secondary incremental encoder interfaces which are optionally equipped with Aerotech's MXH hardware based multiplied encoder technology for up to 65536 times quadrature output. Using a 1V p-p sinusoidal encoder which does not require a costly power supply, this level of multiplication has a 2MHz analogue input frequency that allows nanometre or microradian level resolution across Aerotech's wide range of high precision direct-drive positioning mechanics, without compromise on top speed.

The MXH encoder option also enables the single axis Position Synchronised Output (PSO) feature to be implemented at the highest level. Aerotech's PSO is a powerful algorithmic software tool that precisely coordinates the real-time position from a linear or rotary encoder with high speed output pulses from the controller which are be used to trigger external events.

This feature is widely used in applications such as laser micromachining or position critical NDT where exacting, no compromise synchronisation is required between laser firing or sensor reading and the axis path position.

For the alternative software based MXU encoder version, the encoder interfaces have a 4096 multiplication factor and both MXU and MXH encoder options include end-of-travel limits and home inputs on the primary feedback encoder. An optional I/O expansion board is also available to equip the ML drive with 8 opto-isolated digital inputs and 8 digital outputs (sinking or sourcing) in addition to single 16-bit analog inputs and outputs, and a brake relay output.

As the ML series linear stage amplifier does not include an integrated power supply and the I/O expansion option may not be required for some applications, the drive can be a low cost solution and additionally its small footprint may be advantageous in space restricted OEM applications.

The ML drive's 10A peak current rating will provide more than sufficient power for the majority of micropositioning applications, however where more useful power may be required and in areas where amplifier temperature rise must be kept to a minimum, a water cooled version is available. This version can provide a 35% increase in usable power.

In addition to the ML range, Aerotech also produce linear stage amplifiers with 2 & 3 axis PSO capabilities, integral mains power supplies and built-in I/O and fieldbus interfaces - offering the superb linearity, high bandwidth, zero crossover distortion and ultra-quiet EMC characteristics of the ML series. These control options and higher power versions are available throughout the A3200, Soloist and Ensemble ranges, and in addition Aerotech offer a full complement of PWM stage amplifiers for very high speed and heavy load precision positioning applications.

All of these Aerotech drive technologies may be freely mixed for multi-axis positioning systems ensuring that each axis is cost and performance optimised. A choice of PC-based software-only, rack or panel mounted motion controls in single or multi-axis formats allow optimal performance with diagnostics and comprehensive features that aim to ensure fast product development and commissioning, reduce positioning errors, improve throughput performance and ensure time-saving and quality improving benefits.

High precision industrial positioning

Aerotech has launched a new 560 mm wide ball screw driven positioning stage as part of its PRO series hard top/side sealed precision table range. Available in standard and high speed versions, the extra wide cross section the new PRO560 and PRO560 HS stages provide optimal support for long travel upper axes or large footprint loads. With travel up to 1500 mm and load to 150 kg, the new stages perfectly complement and complete the PRO ball screw driven range which covers stage widths of 115, 165, 225, 280 mm, and now 560 mm.

The PRO ball screw range is characterised by its unique and fully protected side-sealed/hard top design and includes heavy duty linear motion guide bearings for arduous yet high precision industrial positioning applications such as laser welding or EDM machining. The aluminium hard top cover and vertical side seal deflects debris and fully protects the internal stage components. Optional tabletops are also available which can include a brush assembly to remove machining waste from the cover. This stage sealing system is much preferred to conventionally sealed stages that use bellows or slide plates which can ingest debris resulting in eventual sealing failure and replacement.

Through the PRO560 range, six models are available with travels from 300 mm to 1000 mm with maximum speeds of 220 mm/sec for the 300 mm travel stage (140 mm/sec for the 1000 mm travel version). For the PRO560HS, eight models provide travels from 300 mm to 1500 mm with speeds to 1050 mm/sec for the 300 mm version (300 mm/sec for the 1500 travel version). Both types offer a horizontal load capacity of up to 150 kg.

The PRO560 is equipped with a precision ground 5mm/rev ball screw and a 2500 line motor mounted encoder for a positioning resolution of 0.5 µm and bidirectional repeatability of +/- 1 µm. The 25 mm/rev ball screw and 2500 line encoder on the PRO560 HS yields a resolution of 2.5 µm and repeatability to +/- 2.5 µm. Nominal straight line accuracy for both stage types is +/- 17.5 µm for the 300 mm travel versions..

Motor mounting is via a NEMA 34 compatible flange which accepts a Aerotech high performance brushless servo motors or third-party brushed DC and stepper motors. Motor orientation can be in-line with the ball screw or side mounted on the right or left side of the stage with the 'foldback motor' option to save space. A motor mounted brake is available as an option for vertical mounting or for exceptionally safety-conscious applications. End of travel limit switches are available in 5V and 24 V options.

Further options include a wide choice of tabletops with metric or imperial threaded hole patterns to suit the various widths of matching PRO series stages or other Aerotech linear and/ or rotary stages. Alternative accuracy levels for orthogonal alignment are available for X-Y mounted systems and Toe Clamps are available for base mounting the stages. As with all Aerotech positioning mechanics, customised interfacing plates and brackets are offered along with complete machine base/frames, and mounting provision for air or hydraulic services, or other customer equipment.

Aerotech's PRO series also includes linear motor, direct-drive, versions with matching mounting configurations for higher dynamic performance, increased resolution and improved positional accuracy.

The PRO ball screw driven series can be supplied separately or together with a wide choice of Aerotech motion controls for complete automation system solutions - delivered fully tested and ready to run with all tuning and set-up parameters pre-programmed - guaranteeing fast commissioning into the customers application. A choice of PC-based software only, rack or panel mounted motion controls with compatible digital servo amplifiers allow optimal performance with diagnostics and comprehensive features that aim to reduce positioning errors, improve throughput performance and ensure time-saving and quality improving benefits.

Heavy load submicron positioning

Aerotech's PRO-LM series direct-drive, brushless linear servo motor driven stages now include a new 280 mm wide version, available in eight travel options from 300 mm to 1.5 m, for high throughput and heavy load precision positioning applications in harsh industrial environments. The side-sealed/hard top and fully protected stages feature heavy duty linear motion guide bearings, submicron level encoder feedback and optional cable management, and are now available in nominal widths of 165 mm, 225 mm and 280 mm which may be freely mixed to optimise application load and travel requirements.

The new competitively priced PRO280LM is built upon the successful side sealed design that Aerotech has developed over several generations of linear motor and ballscrew driven stages. The aluminium hard top cover, finished in a protective scratch resistant hard coat, is a much preferred alternative to soft fabric or plastic bellows stage covers, especially for applications such as laser machining. The vertical tensioned side straps fully seal the internal stage components from machining or process debris. A wide selection of optional tabletops with steel inserts allow X-Y, XZ or YZ configurations with other PRO series stages with orthogonality certified to 5 arc-secs. Tabletop plates are also available for Aerotech ADRS, ADRT and AGR series rotary stages or to suit customer workpiece mounting in metric and inch hole patterns. Cable management is available for single axis up to customer specified XY, XYZ and XYZ+Rotary stage configurations.

It has a positioning resolution of 250 nanometres from a choice of 0.1 micron line driver or amplified sine output encoders. Other impressive specifications include HALAR calibrated accuracy to +/- 3 microns for the 1.5 m travel version (+/- 2 microns for the 300 mm travel stage) with speeds to 2 metres/sec and acceleration to 3 g. With complementary high specifications for stage flatness, pitch, yaw and roll, and with a maximum horizontal and side load capability to 150 kg, the PRO280LM is well placed for heavy duty industrial applications where no-compromise manufacturing quality and fastest production throughput are of primary importance.

Their brushless direct-drive linear servomotor technology guarantees extremely smooth motion with exacting speed control and precise in-position stability, allowing the PRO280LM to be equally effective for scanning or step/repeat applications or for compound axis contouring. The use of non contacting motors and feedback encoders combines with long life wiper sealed linear motion guide bearings for a rated MTBF life of 20,000 hours with extremely low maintenance.

The company manufactures a wide range of advanced motion controls that optimise the performance capability of the PRO-LM series with powerful motion specific and machine interfacing commands. These include the Position Synchronised Output (PSO) command that completely synchronises real time multi-axis position with laser firing, camera capture, data acquisition or NDT test triggering to produce the highest quality parts or ultimate accuracy test procedures - with minimal cycle time and fastest production throughput. Aerotech's advanced controls include set-up, diagnostics and comprehensive features that reduce position errors, improve settling times and provide a host of other production and commissioning time-saving benefits.

Aerotech's motion systems include motor power and encoder cables plus performance and calibration related documents. Complete machine frames and bases can be included in the scope of supply.

Rated for precise angular positioning in hostile environments

Direct-drive rotary stage fulfils high precision and high performance in adverse conditions

Aerotech's new ASRT series rotary stages feature direct-drive brushless servomotor technology for precise zero backlash positioning in an IP66 sealed design that guarantees operation in hostile environments where dust, dirt and liquids are unavoidable. Aimed at applications involving washdown, dust or mist spray, or where coolants must be used as a part of a machining process, the series is available in three nominal widths of 185 mm, 245 mm and 300 mm in a dual bearing design that can support axial loads up to 175 kg whilst maintaining a tilt error motion of less than 3 arc-sec.

The ASRT series offers the exceptional accuracy and high throughput performance that is synonymous with Aerotech precision mechanics with the further benefit of suitability for harsh and unfavourable environments. A low friction seal between the fixed base and rotating tabletop minimises hysteresis due to direction reversal to allow precise angular positioning and high speed performance. A bi-directional repeatability of less than 1 arc-sec is specified for the optical encoder feedback version whilst a magnetic encoder version available on the smaller stages offers less than 10 arc-sec. The use of non contacting motor and encoder technologies helps contribute to a long life with low maintenance scheduling and particularly suits applications with frequent direction changes such as sensor test and range tracking equipment.

As with almost all of Aerotech positioning mechanics range, both standard and HALAR certified accuracy options are available for best accuracy to within 2 arc-sec for the optical encoder version with a positioning resolution of 0.018 arc-sec for the largest 300 mm width stage. Thanks to the high performance direct-drive brushless and cog-free motor technology used, the stage offers such precision with speeds up to 200 rpm and acceleration in the order of 150 rev/sec2 combined with extremely smooth low-speed motion and excellent in position stability. Users can specify continuous travel or a fixed travel range under 360 degrees rotation.

Other options include through apertures for all stage sizes allowing through-hole mounting of additional equipment or services such as electrical slip ring assemblies or pneumatic/hydraulic supply lines. The ruggedised stage construction includes a polymer based paint finish on an aluminium housing in a choice of colours and the rotating tabletop is finished with a durable hardcoat for maximum protection. Sealed connectors are standard and further optional accessories include an air purge variant for increased sealing performance and a desiccant cartridge system to offset condensation. The standard operational temperature range for the ASRT is 0 to 70 °C with the possibility to increase the lower limit to -20 °C with the air purge and desiccant cartridge options. A protective cover is also available for horizontal axis orientation.
The ASRT series can be used individually or as a part of multi axis linear/ rotary stage set ups and combined with Aerotech's advanced motion controls and servo amplifiers as complete motion systems. Aerotech has a number of complementary linear stages with durable side-seal/hard-top designs that can be combined with the ASRT.

Controller options include the A3200 Digital Automation Platform – a Windows™ based software-only controller for up to 32 axes of fully synchronised and deterministic high performance motion and machine control, complete with Firewire® interfaced servo drives and optional HMI, PLC and vision control modules. The multi-axis Ensemble™ Epaq is available in a 6-axis desktop or 19 inch rack mount, or packaged as series of discrete panel mounted intelligent drives for up to 10 axes. With a full complement of machine I/O plus Ethernet, USB and IEEE488 interfacing, the Ensemble can be configured with linear or PWM stage servo amplifiers or alternatively with stepper motor drives. Single axis applications can be accommodated with stand-alone, panel mounted Soloist™ - a high performance motion controller with integrated servo drive. All Aerotech controls include comprehensive diagnostics and commissioning facilities with programming options including .NET, RS-274 G-code, high level AeroBASIC™ or LabVIEW™.

Aerotech motion systems are supplied as fully tested assemblies complete with motor power and encoder cables with optional machine frames and bases. Full performance and calibration related documents are included and for straightforward commissioning, all motor parameter set-up data for the system is provided along with product training and comprehensive technical support.

nano Motion Technology (nMT) range expands

Following closely behind the recent launch of single-axis and dual X-Y axis ANT series linear nanopositioning stages as a part of Aerotech's nano Motion Technology (nMT) range, two new rotary and two new vertical translation variants have now been introduced. With their direct-drive ANT series now covering 95 mm and 130 mm wide linear and vertical-linear translation stages in addition to rotary and goniometric angular positioners, users can now specify long travel range, multi-axis nanometre resolution mechanics for high throughput production and demanding test and research applications. The new stages perfectly complement the outstanding precision, nanometre level precision and high dynamic performance offered by the landmark nMT range.

The new ANT95-R and ANT130-R rotary stages comprise 95 mm and 130 mm diameter models with a positioning resolution of 0.1 arc sec and with a calibrated repeatability of just 2 arc sec. They both utilise Aerotech's specialised direct-drive motor technology for extremely smooth motion with in-position stability to within a staggering 0.5 arc sec. Both sizes are available in angular travel ranges of 20°, 180° or continuous 360° rotation and maximum speed and acceleration for the latter is up to 200 rpm/400 rad/sec2. Direct axial load capacity is 2 kg for the smaller diameter stage and 3kg for the larger stage. The error motion performance across both sizes of rotary stage (tilt, axial and radial) is in line with the outstanding overall specifications and suited to demanding high throughput manufacturing applications such as disk-drive fabrication, fibre optic device alignment, and MEMS sensor manufacture and test.

The nMT range has been further enhanced with the ANT95-L-Z and ANT130-L-Z series vertical stages which have nominal widths of 95 mm and 135 mm respectively and a calibrated positioning resolution of just 2 nanometres. Supplied complete with vertical mounting angle brackets and integral pneumatic counterbalance mechanisms, the ANT95-L-Z is available in vertical travel ranges of 25 mm and 50 mm whilst the wider ANT-130-L-Z offers 35 mm and 60 mm travel. Within each travel range a high performance –PLUS option is available which increases the repeatability by a factor of around 30%; for the ANT95-L-Z-PLUS this yields a bidirectional repeatability of +/- 75 nanometres.

The design of these new vertical translation stages is derived from the single axis and X-Y linear ANT stages with anti-creep cross roller bearings and a centre driven brushless/non-cogging linear servomotor for ultra smooth performance characteristics and in-position stability of just a few nanometres when driven by Aerotech's ultra low-noise linear stage amplifiers. Aerotech's specially developed 40 MHz linear encoder processing ensures such high resolution and together all of these features ensure a dynamic performance and precision which is much improved over traditional leadscrew driven stages or ceramic motor types. The overall speed and acceleration performance of the new vertical stages is up to 200 mm/sec and 1 g - which though not as high performing as their horizontal plane linear positioning counterparts at 500 mm/sec and 5 g - are still eminently suited to high throughput production and test applications.

All ANT series stages are protected with a durable black hardcoat finish, and exceptionally long working life and low maintenance is guaranteed by the non contacting direct-drive linear and rotary motor technology and non contacting optical encoders used in the design.

The exceptionally high performance specifications for the ANT range are in part attributed to the advanced motion control and drive technologies available as a part of complete motion system solutions from Aerotech. With all cabling included and with fully assembled stages that are thoroughly tested and calibrated in Aerotech's state of the art clean room facilities, complete systems can encompass custom designed machine frames with highly stable granite base and gantries to support customer supplied equipment such as lasers or metrology apparatus.

Aerotech's advanced motion controls include algorithms, data acquisition and analysis tools that counteract the minute disturbances that influence positioning stability and dynamic performance at sub micron levels and optimise overall performance.

Motion control options include the software only A3200 Automation Platform with DSP based Npaq drives or the Ensemble™ series rack or desktop system for multi-axis positioning systems, whilst the Soloist™ series is especially suited to demanding single axis applications. Servo drive technologies include PWM amplifier stages for highest dynamic performance in addition to wide bandwidth and ultra low noise linear servo amplifiers for best in-position stability/lowest jitter performance.

These motion controllers also feature advanced software commands that are designed to simplify interfacing with customers own systems such as the PSO command that synchronises laser firing with real time position. Comprehensive analogue and digital I/O and GUIs are also available along with a broad choice of diagnostic, set-up and programming tools are available for fast and trouble-free system commissioning. Supported programming languages include AeroBASICTM, Visual Basic® C, and C++ with optional advanced application support covering Windows® based ActiveX components and .NET class libraries.

Nanopositioning mechanics and motion controls

Laser technology solutions specialist Altechna Co. (LT) is basing its Alt-SCA femtosecond laser micromachining system around Aerotech's ANT130 series linear motor driven nanopositioning stages in a customised 3-axis XYZ configuration that includes a granite bridge support structure and a unique pneumatically counterbalanced vertical axis. The synchronisation between the one nanometre resolution positioning system and the laser's firing pattern is precisely and crucially controlled with the advanced PSO (Position Synchronised Output) command from their software based A3200 motion controller which is built into Altechna's SCA (System Control Application) front end software using .NET class libraries. (What is a femtosecond? - Wikipedia!)


Altechna has developed its SCA software with C++ and C# to provide a flexible yet powerful control platform for laser micromachining that is capable of 3-levels of simple-to-complex micro-fabrication where, at the basic level, a WYSIWYG equipped GUI is able to convert complex positioning information from BMP or PLT files without the need for G-code programming. Moreover, SCA can be used to program multiplex trajectories using mathematical functions (Fig. 1). At the highest level, programmers may write micro-fabrication code directly in C++ and C#. Altechna's software has been applied to ultrafast-laser materials processing research at the University of Southamptons' Optical Research Centre (Fig 2.).


The AltSCA femtosecond laser machining system integrates the complete Aerotech motion sub-system including rack mounted linear servo-amplifiers with a 10W Yb:KGW (1030 nm) femtosecond laser source, machine vision, beam shaping optics and a galvo scanning head with resulting fabrication speeds up to 350000 pixels per second with 25400 DPI resolution (Fig. 3). Combining such high processing speed and large area positioning capability with nanoscale resolution and sub- micron accuracy, the AltSCA is aimed at both research and industrial users alike for development and/or high throughput manufacture of surface or 3D micro-nano structures for anything from MEMS sensors and optical micro-elements fabrication to microchip repairs and waveguide production.

Altechna is based in Vilnius, (LT) and works closely with the Laser Nanophotonics Group at Vilnius University where the Aerotech equipment is being used for research involving the fabrication of fully functioning microlenses in the order of 100 μm. These three dimensional structures are paving the way for integrated 3D optical micro-circuits.

They are also working on fully integrating Galvo-scanners with the ANT130 positioning system by using Aerotech's Nmark SSaM (Synchronized Scanner and Motion module). This will allow wide-format bitmaps to be processed continuously by enabling laser micromachining of structures and patterns that exceed the normal field of view for the Galvo scanner.

The AltSCA femtosecond laser machining system uses an integrated ANT130 XY series low profile X-Y stage that supports the object workpiece and a separate vertically mounted Z-axis stage for laser head manipulation. The Z-axis is fixed to the granite bridge structure and its pneumatic counterbalance is based upon a tried and tested design that Aerotech has developed over previous generations of micro-positioning stages. The large granite base provides high stability for the positioning system and the complete assembly includes all cabling and provision for air supply.

The ANT130 series has a nominal width of 130 mm and is available in travel ranges from 35 mm to 160 mm, in a choice of two accuracy grades up to +/-250 nanometres to suit high or ultra-high precision requirements. The performance characteristics (pitch, yaw and roll etc) ensure that the combined flatness, straightness, perpenicularity, abbe error, and all other critical geometric specifications do not compromise the nanometre level machining requirements for this application. The compact design includes anti-creep cross roller bearings and a centre driven brushless/non-cogging linear servomotor with 1 nanometre resolution encoders. Maximum speeds are up to 350 mm per second with acceleration to 1g. The non-contact linear servomotor and encoder system helps to ensure a very long working life with minimal maintenance..

The three-axis ANT130 is a part of Aerotech's nano Motion Technology (nMT) positioning range that brings together linear, rotary and goniometric stages to provide exceptional precision, rapid acceleration, high speed and ultra-fine resolution for nanometre resolution positioning. With zero-backlash and hysteresis in combination with high speed encoder feedback processing and real-time axis calibration, the nMT range is providing the enabling technology for many demanding applications where large area/high throughput positioning involves nanometre level structuring – a perfect solution for ultrafast-laser micromachining.

Aerotech’s PC-based A3200 Automation Platform is a software-only multi axis motion controller for up to 32 axes based on the IEEE-1394 Firewire® protocol network delivering fully deterministic, distributed and tightly synchronised motion and I/O control in combination with Aerotech’s Ndrive digital servo amplifiers. Further software expansion modules are available for additional machine control functions such as HMI, Vision and PLC. The flexibility and powerful advanced features of the A3200 include sophisticated commands such as the PSO along with diagnostics, commissioning and programming options that include AeroBASICTM, Visual Basic® C, C++, with higher levels including Windows® based ActiveX components with C++, VB and .NET class libraries.

For such high precision and high resolution applications Aerotech recommends its DSP based linear stage servo amplifiers rather than PWM drive stage alternatives to guarantee extremely low noise and jitter free stability. Its smooth current control also ensures ultra-smooth motion which is essential for sub nanometre applications.

Position direct-write laser application

One of the many varied and interesting research projects at the University of Southampton’s ORC (Optoelectronics Research Centre) (GB) involves direct UV laser writing of integrated optical circuits on specialised glass substrates and on its own patented ‘flat’ optical cable. With application potential from telecom network components through to lab-on-a-chip (LOC) biological and chemical sensors, the photonic circuits are produced with the help of nanometre level precision positioning systems and motion controls from Aerotech.

The types of optical components that are typically written into the substrates include curved or straight waveguides and splitters that channel light around the circuit; and Bragg gratings which can be used to measure the refractive index of fluids or other materials. These refractive index sensors are now built into complete optical microchip solutions for bio/chemical sensing by the ORC spin out company Stratophase Ltd. The basis principle involves passing a sample material over a sensing window and the wavelength of the light reflected from the Bragg grating confirms that its refractive index is within a certain band. With a typical sensitivity of one part in a million, these devices are proving an excellent solution for a wide range of commercial bio/chemical detection applications from sugar concentrations in foods, to toxin, virus and bacteria discovery for pharmaceuticals, and petro-chemical quality control processing.

When a similar UV writing process is directly applied to the special flat optical cable which is manufactured at the ORC, the potential for these types of sensors may be produced without the need to connect high loss pigtail connections between optical fibre and optical material substrates - and may be applied for multiple sensor solutions over extremely long distances for applications that could include biological and chemical monitoring in supply pipes and rivers. The work in this area is at an early stage but the potential outcome using such techniques may also lead to the ‘holy grail’ of producing complete active switching circuits for optical computing.

As opposed to more traditional photolithography mask processing methods for these types of devices, the direct write approach benefits from single-step integration and is consequently much faster and very adaptable for rapid prototyping/short production runs at reasonable costs. The basics of the direct writing process involves modifying the core layer material by manipulating the substrate under the focussed UV laser, so clearly the precision and dynamic performance of the positioning system is fundamental and an intrinsic ‘enabling technology’ for the success of the process.

The high power UV laser is directed through an interferometer to produce an intense dual beam interference pattern at the target area. During the writing process, its focal length is held constant and the overall positioning system flatness, derived from pitch, roll, yaw and Abbe errors from both X and Y axes, must maintain sub-micron tolerances. Furthermore, the writing process needs to be continuous as the core materials are adversely affected by heating, so the control of the UV lasers’ power and firing pattern is completely synchronised with the on-the-fly compound translation of the X and Y axes. This synchronisation is another key factor for the process and is carried out within the Aerotech controller by an advanced software feature called PSO or Position Synchronised Output.

PSO triggers the UV laser in real time during continuous motion, processing high speed encoder feedback in conjunction with XY position array information for the particular feature being written. In this way, not only is each feature held to nanometre level tolerances in all planes, but the accuracy and repeatability from feature to feature and the distance between them is also realised with fantastically high precision.

The positioning system used at the ORC is an Aerotech ABL9000 series air bearing stage complete with the A3200 Digital Automation Platform motion control system with FireWire® networked Ndrive linear stage amplifiers. With a 300 mm x 300 mm travel range, this brushless linear servomotor driven, ultra-high precision stage features a balanced air-on-air preload system for maximum stiffness and glass scale encoder feedback with an encoder resolution of just one nanometre. The H-bridge design maintains both axes and their respective encoders at the same level which co-locates the centrelines of mass, force and feedback - effectively ensuring that errors are minimised for best performance straightness and flatness. With dual linear motor driven Y axes and active yaw control, the ABL9000 is able to produce perfectly parallel scans, straight lines and interpolated curves over its entire working surface. Each axis is also factory calibrated by them against a laser interferometer with the error map information added to the controller. In operation this ensures optimum translation stage accuracy.

The combination of Aerotech’s BLM series brushless linear servomotors and HLe series linear servo amplifiers provide the smoothness and stability required for nanometre resolution positioning whilst ensuring the required high bandwidth, zero crossover distortion and ultra-quiet EMC characteristics which are essential for this application.

The A3200 Digital Automation Platform provides fully deterministic PC based motion control with advanced diagnostics, set-up and tuning features that ensure perfect results. As well as the PSO feature mentioned earlier, the A3200 includes trajectory generation with multi-block look ahead to minimise geometry errors in tight profiles by regulating the speed and/or the position on each axis. The ORC use G-code programming for their particular application but the A3200 is also equipped for programming in their own AeroBASICTM or in C, C++, and Visual Basic®. For complete application integration the optional Ncontrol® SDK software development kit may be used with Windows® based ActiveX components, C++, VB and .NET class libraries. There are also a number of advanced software and hardware features available to optimise throughput performance and further improve overall machine operation.

The complete system was supplied to the ORC on a customised granite base with an additional fixed bridge arrangement that provides a stable platform for the ORC supplied interferometer optical system. The scope of supply also included direct drive rotary and vertical lift stages with comparable resolution and precision that are used together for pre-alignment of the substrate. Full cable management was included in the design which greatly assisted commissioning at the ORC.

The excellent performance of the ABL9000 series has now been enhanced with Aerotech’s PlanarHD air bearing stage. The new stage is aimed at high throughput scanning and ultra-high precision step-and-settle applications found in semiconductor processing and other emerging MEMS/Nano technologies. The design features larger air bearing surfaces for improved load carrying and higher dynamic characteristics. A brief performance specification includes 2 m/sec scan velocity and peak acceleration to 5 g - with a positioning resolution of up to 0.25 nanometres, repeatability to 50 nanometres and accuracy to +/- 300 nanometres.