It is now possible to measure the temperature of reflective metals and semiconductors, as low as 350°C, at low cost and without contact.
The new PyroMini 0.9 infrared pyrometer, from Calex, can view into a vacuum chamber through a quartz or glass window, and measure the temperature of the surface of the silicon wafer. Temperature ranges from 350°C to 2000°C are available, and the low-temperature 350°C to 800°C model opens up new opportunities for temperature monitoring and control in silicon wafer processing.
Stable and repeatable measurements can be taken continuously for long periods, with a fast response time of just 240 milliseconds. With the optional MicroSD Card installed, over a year of data can be logged, even at the fastest sample rate of one reading per second.
The highest possible accuracy is provided by the PyroMini 0.9’s short-wavelength detector, which ensures that any error in emissivity setting or change in emissivity has the minimum effect on the measurement.
Miniature sensing head:
- Dimensions 18 x 45 mm, stainless steel 316, sealed to IP65
- Cable length of up to 30 m available
Electronics module with optional touch screen:
- Large, bright temperature display
- Visual alarm indication
- Scrolling temperature graph
- Full sensor configuration
- Basic models available without a screen
Outputs:
- Choice of 4-20 mA or RS485 Modbus output
- 2 x alarm relays on touch screen models that could be connected to alarm equipment directly, without a separate trip amplifier
Accessories are available including mounting brackets, air purging and laser sighting.
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